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[Basic Knowledge about Cryopumps 7 ]

Unit Conversion Table

1.Pressure

Pa Torr bar kg/cm2 psi atm
Pa 1 7.5E(-3) 1E(-5) 1.02E(-5) 1.45E(-4) 9.87E(-6)
Torr 133 1 1.33E(-3) 1.36E(-3) 1.93E(-2) 1.32E(-3)
bar 1E5 750 1 1.02 14.5 0.987
kg/cm2 9.80E4 735 0.98 1 14.2 0.968
psi 6.89E3 51.7 6.89E(-2) 7.03E(-2) 1 6.80E(-2)
atm 1.01E5 760 1.01 1.03 14.7 1

2.Pumping Speed

m3/s L/s
m3/s 1 1E3
L/s 1E(-3) 1


3.Flow Rate

Pa・m3/s Pa・L/s Torr・L/s sccm
Pa・m3/s 1 1E3 7.52 592
Pa・L/s 1E(-3) 1 7.52E(-3) 0.592
Torr・L/s 1.33E(-1) 133 1 78.9
sccm 1.69E(-3) 1.69 1.27E(-2) 1

4.Pumping capacity

Pa・m3 Pa・L Torr・L L(Standard)
Pa・m3 1 1E3 7.52 9.87E(-3)
Pa・L 1E(-3) 1 7.52E(-3) 9.87E(-6)
Torr・L 1.33E(-1) 133 1 1.32E(-3)
L(Standard) 1.01E2 1.01E5 760 1

5.Temperature

K ℃+273.15
°F (9/5)℃+32
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