Products
Products
Speciality Cryopumps for Sputtering Process
CRYO-U12HSP
FEATURES
- Argon capacity is twice of the standard model (U12H).
- Hydrogen pumping speed is 1.5 times of standard model (U12H)
- Extended intervals between regenerations means higher tool availability.
- Multiple connections (up to 3) can be made.
FEATURES
SPECIFICATIONS
Pumping speed (20℃) | Nitrogen | L/s | 4,100 |
Hydrogen | 6,000 | ||
Argon | 3,400 | ||
Water | 9,500 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 2.0×103(15.0) |
Pumping capacity | Argon | Pa・L(Torr・L) | 4.4×108(3.3×106) |
Hydrogen | 1.6×106(1.2×104) | ||
Cooldown time | min(Hz) | 90/80(50/60) | |
Mounting flange | UVG-300,10BANSI | ||
Compressor unit | C30VR | ||
Weight | Kg | 42 |
*Maintenance interval : every 16,000 hours
*Travelling base is optional.