Products
Products
Speciality Cryopumps for Sputtering Process
CRYO-U10HSP
SPECIFICATIONS
Pumping speed (20℃) | Nitrogen | L/s | 2,400 |
Hydrogen | 3,600 | ||
Argon | 2,000 | ||
Water | 6,900 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.30×103(9.8) |
Pumping capacity | Argon | Pa・L(Torr・L) | 2.0×108(1.5×106) |
Hydrogen | 1.2×106(9.0×103) | ||
Cooldown time | min(Hz) | 120/110(50/60) | |
Mounting flange | UVG-250,10BANSI | ||
Compressor unit | C15R | ||
Weight | Kg | 36.0 |
*Maintenance interval : every 16,000 hours
*Travelling base is optional.