Products
Products
CRYOPUMPS (STANDARD) 10" TYPE
CRYO-U10H
FEATURES
- Running costs can be lowered by multiple operation (two units)
- For experimental equipments and medium-size production facilities.
FEATURES
SPECIFICATIONS
Pumping speeds(20degrees) | Nitrogen | L/s | 2,400 |
Hydrogen | 3,600 | ||
Argon | 2,000 | ||
Water | 6,900 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.3×103(9.8) |
Pumping capacity | Argon | Pa・L(Torr・L) | 1.0×108(7.8×105) |
Hydrogen | 1.2×106(9.0×103) | ||
Cooldown time | min(Hz) | 110/100(50/60) | |
Mounting flange | UVG-250 | ||
Compressor unit | C15RT | ||
Weight of cryopump | kg | 29.0 |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours