Products
Products
CRYOPUMPS (STANDARD) 12" TYPE
CRYO-U12H
FEATURES
- Suitable for medium- and large-size equipments.
- Resistant to thermal load. Suitable for various processes.
FEATURES
SPECIFICATIONS
Pumping speeds(20degrees) | Nitrogen | L/s | 4,000 |
Hydrogen | 6,000 | ||
Argon | 3,300 | ||
Water | 9,500 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 2.0×103(15) |
Pumping capacity | Argon | Pa・L(Torr・L) | 2.1×108(1.6×106) |
Hydrogen | 9.8×105(7.4×103) | ||
Cooldown time | min(Hz) | 85/75(50/60) | |
Mounting flange | UVG-300,10BANSI | ||
Compressor unit | C30VRT | ||
Weight of cryopump | kg | 40.0 |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours