Products
Products
CRYOPUMPS (STANDARD) 12" TYPE
CRYO-U12HL
FEATURES
- Flat and compact design.
- Supports system downsizing.
- We can also manufacture pumps of other sizes.
FEATURES
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 4,000 |
| Hydrogen | 6,800 | ||
| Argon | 3,300 | ||
| Water | 9,500 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 2.0×103(15.0) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 3.1×108(2.3×106) |
| Hydrogen | 9.8×105(7.4×103) | ||
| Cooldown time | min(Hz) | 90/80(50/60) | |
| Mounting flange | UVG-300,10BANSI | ||
| Compressor unit | C30VRT | ||
| Weight of cryopump | kg | 40 | |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
Inquiries about Products
Please feel free to contact us about our product.
Our consultants will propose plans that fit your needs.
