Products
Products
CRYOPUMPS (STANDARD) 16" TYPE
CRYO-U16
FEATURES
- Suitable for medium and large-size equipments.
- Suitable for batch type large deposition systems.
- Resistant to thermal load.
FEATURES
SPECIFICATIONS
Pumping speeds(20degrees) | Nitrogen | L/s | 5,000 |
Hydrogen | 10,000 | ||
Argon | 4,200 | ||
Water | 16,000 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.4×103(11.0) |
Pumping capacity | Argon | Pa・L(Torr・L) | 4.3×108(3.3×106) |
Hydrogen | 2.4×106(1.8×104) | ||
Cooldown time | min(Hz) | 110/100(50/60) | |
Mounting flange | UVG-400 | ||
Compressor unit | C30VRT | ||
Weight of cryopump | kg | 61.0 |
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours