Products

CRYOPUMPS (STANDARD) 20" TYPE
CRYO-U20H

FEATURES

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 10,000
Hydrogen 18,000
Argon 8,400
Water 29,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.7×103(12.8)
Pumping capacity Argon Pa・L(Torr・L) 5.8×108(4.4×106)
Hydrogen 4.6×106(3.4×104)
Cooldown time min(Hz) 160/140(50/60)
Mounting flange UVG-500,20BANSI,ISO-500
Compressor unit C30PVRT
Weight of cryopump Kg 72.0

*Maintenance interval: every 16,000 hours

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