Products

CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22P

FEATURES

SPECIFICATIONS

Pumping speeds (20degrees) Nitrogen L/s 11,500
Hydrogen 14,000
Argon 9,700
Water 39,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.7×103(12.8)
Pumping capacity Argon Pa・L(Torr・L) 5.8×108(4.4×106)
Hydrogen 6.0×106(4.5×104)
Cooldown time min(Hz) 180/170(50/60)
Mounting flange UVG-550
Compressor unit C30PVRT
Weight of cryopump Kg 115.0

*Maintenance interval: every 16,000 hours

Inquiries about Products

Please feel free to contact us about our product.
Our consultants will propose plans that fit your needs.

Send an E-mail

Download materials on our products