Products
Products
CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22P
FEATURES
SPECIFICATIONS
Pumping speeds (20degrees) | Nitrogen | L/s | 11,500 |
Hydrogen | 14,000 | ||
Argon | 9,700 | ||
Water | 39,000 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.7×103(12.8) |
Pumping capacity | Argon | Pa・L(Torr・L) | 5.8×108(4.4×106) |
Hydrogen | 6.0×106(4.5×104) | ||
Cooldown time | min(Hz) | 180/170(50/60) | |
Mounting flange | UVG-550 | ||
Compressor unit | C30PVRT | ||
Weight of cryopump | Kg | 115.0 |
*Maintenance interval: every 16,000 hours