Products

CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22WB

FEATURES

SPECIFICATIONS

Pumping speeds (20degrees)(20℃) Nitrogen L/s 13,000
Hydrogen 16,500
Argon 11,000
Water 39,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 3.5×103(26)
Pumping capacity Argon Pa・L(Torr・L) 8.1×108(6.1×106)
Hydrogen 8.5×106(6.4×104)
Cooldown time min(Hz) 165/150(50/60)
Mounting flange UVG-550
Compressor unit C30PMVRT×1
Weight of cryopump Kg 125.0

*Maintenance interval: every 16,000 hours

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