Products
Products
CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22WB
FEATURES
SPECIFICATIONS
Pumping speeds (20degrees)(20℃) | Nitrogen | L/s | 13,000 |
Hydrogen | 16,500 | ||
Argon | 11,000 | ||
Water | 39,000 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 3.5×103(26) |
Pumping capacity | Argon | Pa・L(Torr・L) | 8.1×108(6.1×106) |
Hydrogen | 8.5×106(6.4×104) | ||
Cooldown time | min(Hz) | 165/150(50/60) | |
Mounting flange | UVG-550 | ||
Compressor unit | C30PMVRT×1 | ||
Weight of cryopump | Kg | 125.0 |
*Maintenance interval: every 16,000 hours