We are proud to offer many different models of cryopumps with proven reliability, excellent performance and quality.

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Products

Products

CRYOPUMPS (STANDARD) 4" TYPE
CRYO-U4H

FEATURES

  1. Excellent pumping performance for a 4-inch cryopump
  2. High pumping speed improves the pumping efficiency and productivity.
  3. Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
  4. Up to four units can be run by one compressor.
  5. Customized design is available to fit your needs.

FEATURES

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 450
Hydrogen 500
Argon 370
Water 1,100
Ultimate pressure Pa 10-7
Maximum throughput Argon Pa・L/s 1.3×103
Pumping capacity Argon Pa・L 1.0×107
Hydrogen 1.5×105
Cooldown time min(50/60Hz) 45/50
Weight of cryopump Kg 14.5
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