Products

CRYOPUMPS (STANDARD) 6" TYPE
CRYO-U6H

FEATURES

  1. Light-weight and compact. Our smallest standard product.
  2. Suitable for small vacuum systems in the laboratory.
  3. Multiple operation (up to 3 units)
  4. Ultra-high vacuum (10-8Pa or lower)

FEATURES

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 750
Hydrogen 1,100
Argon 620
Water 2,100
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.1×103(7.9)
Pumping capacity Argon Pa・L(Torr・L) 5.6×107(4.2×105)
Hydrogen 3.1×105(2.3×103)
Cooldown time min(Hz) 80/70(50/60)
Mounting flange UVG-150,UFC-203
Compressor unit C10, C10AT, C10ES
Weight of cryopump kg 19

Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours
COMBINATION OF CRYOPUMP AND COMPRESSOR UNIT

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