Products
Products
CRYOPUMPS (STANDARD) 8" TYPE
CRYO-U8HL
FEATURES
- Flat and compact design
- Supports system downsizing
- Multiple operation (up to 3 units)
- We can also manufacture pumps of other sizes.
FEATURES
SPECIFICATIONS
Pumping speeds(20degrees) | Nitrogen | L/s | 1,500 |
Hydrogen | 2,200 | ||
Argon | 1,200 | ||
Water | 4,000 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.2×103(8.9) |
Pumping capacity | Argon | Pa・L(Torr・L) | 1.6×108(1.2×106) |
Hydrogen | 1.2×106(9.0×103) | ||
Cooldown time | min(Hz) | 110/100(50/60) | |
Mounting flange | UVG-200 | ||
Compressor unit | C10, C10AT, C10ES | ||
Weight of cryopump | kg | 20 |
Wide Variety of Models, ranging from 6 diameter to 30 diameter.
*Maintenance interval: every 16,000 hours