Products
Product information
For Sputtering Process
Our cryopumps designed for sputtering process increase tool availability by extended regeneration intervals along with increased pumping capacity.
We are proud to offer many different models of cryopumps with proven reliability, excellent performance and quality.
Our cryopumps designed for sputtering process increase tool availability by extended regeneration intervals along with increased pumping capacity.
ULVAC CRYOGENICS INCORPORATED
■Head Office and Factory
1222-1 yabata,Chigasaki,Kanagawa,253-0085,Japan
TEL:+81-467-85-8884(sales),+81-467-85-9366(service) FAX:+81-467-85-9356
■Kyoto Office
Akebono Bldg 97,Nakajimahoribatacho,Fushimi-ku,Kyoto,612-8452,JAPAN
TEL:＋81-75-605-5590 FAX:＋81-75-605-5591
